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A low stress silicon oxide film was deposited by Ionic Systems on a gold layer deposited on a release layer on an optical element. After oxide deposition, a ring was bonded to the oxide and the release layer was removed resulting in a gold coated membrane replication of the optical element. The membrane is shown after release. Film distortion beyond the bond ring is due to excess material. The membrane is 100mm in diameter and was developed for General Research, Santa Barbara, CA.

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